RKH Series All Teflon Capsule Filter
RKH Series All Teflon Capsule Filter
RKH series of perfluorinated spherical cores are used to protect chemical pumps and terminal flow cores. They can be installed at the front end of wet process pumps to capture and protect large wafer debris. These debris can easily damage the bellows and the diaphragm inside the pump.
Features and Benefits
- Can be used in high-temperature environments
- Large orifice ensures optimal process flow and minimal dropout, reducing downtime and eliminating the risk of expensive pump damage
- Excellent flow accurcy extends service life while maintaining desiccant capability
- Easy-installation design allows customers to easily integrate it into existing pumps, reducing chemical residue
Specific Applications
- Semiconductor wet processing
- Corrosive chemical solvents and stripping agents
- Cleaning and rinsing processes
