Filter for Polishing Slurry Filtration

Filter for Polishing Slurry Filtration


The KANER REE series filter cartridges are suitable for CMP (Chemical Mechanical Polishing) slurry recycling processes. They utilize multiple layers of nanofiber to enhance liquid flow rate and incorporate gradient design to improve particle interception capability and service life. The foldable structure accommodates a higher amount of suspended solids, extending the filter's lifespan. The capsule-style design allows for quick replacement, avoiding direct contact with the polishing slurry.

Features and Benefits:

  • Multiple layers of nanofiber enhance flow rate
  •  Special winding and folding structure achieve a balance between small and large particles in the polishing slurry, preventing scratches
  • Continuous graded porous structure effectively extends the service life and enhances dirt-holding capacity
  • Capsule-style structure allows for easy installation, cleaning, and replacement