Depth Filter for Polishing Slurry Filtration
Depth Filter for Polishing Slurry Filtration
CMP cartridges use a unique rolled structure which ensures the precise filtration of CMP slurry. It captures the large particles efficiently and lets the usable particles pass through. The graded pore size from outside to inside increases the dirt-holding capacity and extends the filter service life.
Features and Benefits
* Low Extraction : With a 100% polypropylene structure and ultrasonic thermal fusion technology, no adhesives are used, resulting in minimal leachables and achieving the lowest extractables.
* Pore Structure: The gradient pore structure prevents clogging of the membrane surface by condensation grinding fluid, thereby increasing the membrane's usability and extending its service life.
* High Efficient Filtration: The unique fiber winding structure accurately filters CMP (Chemical Mechanical Planarization) grinding fluid, capturing large molecules and releasing effective molecules.
* No Fiber Releasing: The special external grid prevents fiber shedding from the filter.
