Filter for Polishing Slurry Filtration

Filter for Polishing Slurry Filtration


Kaner REE Series filter is made for CMP slurry circulation process. The use of multi-layer nano-fibers can increase flow rate, and the gradient design increases particle interception ability. The pleated structure contain more suspended dirt which increases service life effectively. Capsule structure can be quickly replaced to avoid direct contact with CMP slurry.

Features and Benefits:

  • Multi-layer nanofiber increasing flow rate
  • The use of special winding and pleating structure keep balance between the small particles and large particles in the slurry to prevent scratches
  • Continuously graded porous structure effectively prolongs service life and improves dirt holding capacity
  • Capsule structure can be installed, clean and replace easily