Ultrapure Chemicals Filter Cartridge
Ultrapure Chemicals Filter Cartridge
KANER DUR series are developed as a high flow performance, cleanliness and contamination control at highly corrosive acid and base solutions. The modified PTFE membrane enables semiconductor industries to meet their critical chemical filtration requirements.
Excellent chemical compatibility and superior filtration efficiency in result of extending service life.
Excellent chemical compatibility and superior filtration efficiency in result of extending service life.
Features and Benefits:
- Superior filtration efficiency and high flow rate
- Excellent chemical compatibility
- All fluorine filter cartridge suitable for high corrosive and high-temperature chemicals
- 100% integrity test
- IPA pre-wet not required
Specific Applications:
- Semiconductor FEOL and BEOL processing
- Wet process cleaning, SC1、SC2、SPM…
- Wet Etching
- TMAH
- HCL、NH4OH、H2SO4、H3PO4、NHO3、H2O2
